Magnetic coupling and the vacuum robot shaft theoretical modeling and experimental research

　　Title: Magnetic coupling and the vacuum robot shaft theoretical modeling and experimental research
　　Author: Wang Yu Lin
　　Degree-granting units: Shanghai Jiao Tong University
　　Keywords: vacuum robot;; magnetic coupling;; direct drive;; equivalent magnetic charge method;; chip current law;; simulation optimization
　　Abstract:
　　Robot vacuum before said semiconductor devices of the cluster-type reaction process chamber to transfer wafers core components, attributable to
　　Embargo products, China has restricted the manufacturing of semiconductor equipment, machine, "Kabo Zi" problem. Atmospheric and vacuum neodymium magnets density between
　　Sealing isolation and power constraints of the vacuum transfer robot is to improve the technical performance bottleneck. Therefore, the vacuum robot breakthroughs in key technologies and
　　The innovative design of the prototype system, with independent intellectual property rights for the realization of the whole semiconductor device core components has important theoretical significance and
　　Practical value. This paper to the inside and outside the axis of magnetic coupling modeling and analysis and optimization as the main target, combined with magnetic drive technology and
　　Direct drive technology, design the layout of the vacuum coaxial two degrees of freedom robot prototype power transmission shaft.
　　In this paper, were built
　　Inside and outside the established theoretical model of magnetic coupling axis and three-dimensional finite element model. Improved equivalent magnetic charge method and the magnetic pieces together to solve current method
　　Transfer torque coupling mathematical model, the introduction of magnetic flux leakage loss coefficient, were obtained by two methods based on internal and external axial gap type magnetic coupling
　　The maximum torque of simplified formula to expand the scope of the model, significantly improves both accuracy and efficiency of the solution method. Among them,
　　Film on the current method improves the solution accuracy of 25% -30%, equivalent magnetic charge method to improve the accuracy of 4% -30% http://www.chinamagnets.biz/Neodymium/Ball-Neodymium-Magnets.php more efficient solution than doubled.
　　Current law through the use of film, equivalent magnetic charge method and the finite element model, a comprehensive analysis of the magnetic coupling geometry with the maximum torque
　　, Maximum torque volume, and start the torsional stiffness of the relationship. And use the three-dimensional finite element method, respectively, the magnetic effect of the yoke, multi-group
　　Magnetic coupling between the magnetic coupling effect, and four different configurations of internal and external axis magnetic coupling of the simulation analysis. The results are
　　Applied to optimize the design of magnetic coupling
　　Based on magnetic coupling in the practical application of a vacuum when the robot shaft coupling conditions,
　　To simultaneously optimize two magnetic coupling, for example, the establishment of a magnetic coupling design geometry optimization objective function. Put forward innovative
　　An orthogonal experimental design techniques to optimize the design of small-scale exhaustive program, look at the overall design parameters, combined with the analytical method
　　Operational efficiency and accuracy of three-dimensional finite element method the advantages of high, using orthogonal experimental method and small-scale exhaustive method significantly reduces the analysis
　　Model number, is an efficient and practical, stable and reliable optimization method. In this case, the final optimized parameter set available table than the orthogonal
　　Optimal parameter set relative index value increased by about 30%, optimize the design of the target consistent with the results.
　　With two self-developed
　　Coaxial distribution from the degree of vacuum robot prototype power transmission shaft. Combined with vacuum robot development, innovation in the isolated gland
　　Designed for step-hollow thin-walled container structures, and isolated sets of intensity and radial deformation of the check, put the eddy current loss of isolation
　　Loss for the research and analysis. In addition, we propose a vacuum robot for magnetic coupling design, direct drive for split
　　Motor shaft of the study design, research and development of next-generation vacuum robot has important reference value.
　　Finally, can be developed
　　Magnetic coupling between the rotor outside the test deviation of the experimental platform for the axial deviation, radial deviation, and angular deviation of the external axis
　　Magnetic couplings transmit torque and dynamic performance tests. The results show that, in practical applications, inside and outside the axis of the magnetic deviation
　　Torque transfer coupling and dynamic tracking features have little effect. Experiment, the magnetic coupling of the dynamic tracking performance is good, and start-up phase
　　, The response time of less than 0.0ls; when the peak speed of 670deg / s, acceleration 1260deg/s2, the settling time tS of 0.35s, a variety of
　　The maximum deviation of tracking error δ are 20 'or so, the steady-state error ess in the 2' or so. In addition, the positioning accuracy and re-shafting
　　Re-positioning accuracy and dynamic response characteristics of the test results show that it has a good tracking performance, steady-state error ess in the 3 'left
　　Right, each group of magnetic coupling between the magnetic coupling effect is very small.
　　Degree Year: 2009