微细结构中永磁材料电铸技术研究

微细结构中永磁材料电铸技术研究
　　Due to the increasing demand for micro products along with the development of micro electromechnical system technology,fabricating micro products by traditional micro-machining technology can hardly meet the requirement of micro system .Nevertheless,fabricating micro parts employing micro-electro forming teehno1ogy has becoming an important development trend for its high efficiency,steady quality and so on.As a new micro fabrication technology,micro Neodymium magnets electroforming is a combination of the conventional electroforming and the integrated circuit process.
　　The development,application and current research situation were summarized.A reliable process of micro electroforming was described in the dissertation.
　　Research on the basis of micro electroforming's theory.Design the power of micro electroforming.The suitable electrolyte components for micro electroforming were given.Pulse electroforming Parameters were optimized through the test method.Ni-Fe alloy membrane was fabricated.Analyzed the microstructures of the deposited layers by adopting the Seallning http://www.chinamagnets.biz/Neodymium/Ball-Neodymium-Magnets.php Eleetron Microscope(SEM) and the Atomic Force Microseope(AFM).
　　Experimental results indicate that shiny,even and fine Ni-Fe alloys thin film was fabricated,Ni-Fe alloys in the ratio of 79% Ni to 21% Fe is controlled according to the requirement of the soft magnetic materials,Technology of experiment can be duplicated.